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Title: Highly compact surface micromachined metamaterial circuits using multilayers of low-loss Benzocyclobutene for microwave and millimeter wave applicationsAuthor: Eliecer Sr. D. / Cheng X. / Yoon Y.-K.Language: InglésRepository: 61Subject: Batch fabrication / Benzocyclobutene / Dielectric interlayers / Dual Band / Electromagnetic structure / Fabrication process / Finite-ground coplanar waveguides / Left handed / Low resistivity / Low temperatures / Meander inductors / Metal insulator metal capacitor (MIM) / Micromachined / Millimeter-wave applications / Multi-band operations / Multilayer fabrication / Multilayer surfaces / Multiple devices / Negative tones / On-wafer / Pass bands / Post-CMOS / RF-circuits / Silicon substrates / Simulations and measurements / Unit cells / Butenes / CMOS integrated circuits / Computer simulation / Coplanar waveguides / Electric lines / Fabrication / Metamaterials / Millimeter waves / Multilayers / Three dimensional computer graphics / Transmission line theory / MIM devices
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