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Query: MODELING Year: 2011 Repository: 34 Subject: Microsystems

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Title: PARAMETERIZED LAYOUT SYNTHESIS OF A CMOS-COMPATIBLE SCANNING MICROMIRROR WITH ELECTROTHERMAL ACTUATION AND BIMODAL RESONANT BEHAVIOR
Language: Inglés
Repository: 34
Subject: Multidisciplinarias (Ciencias Sociales) / Microsystems / multiphysics modeling / CMOS-compatible micromachining / design methodology / optimal design automation / optical imaging

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