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Subject: MEMS Language: Español Repository: 56

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Title: Fabricación de sistemas MEMS – un caso de estudio en la fabricación de un micro-espejo / Fabrication of mems devices – a scanning micro mirror case study
Author: Zarzycki, Artur / Gambin, Wiktor L. / Bargiel, Sylwester / Gorecki, Christophe
Language: Español
Repository: 56
Subject: MEMS / microsistemas / micro fabricación / micro tecnología / micro-escáner / micro espejo de escaneo. / microsystems / microfabrication / microtechnology / microscanner / scanning micromirror

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