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Subject: 2203 Electrónica Year: 2006 Language: Inglés Document Type: Artículo

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Title: Compositional analysis of polycrystalline hafnium oxide thin films by heavy-ion elastic recoil detection analysis
Author: Martínez Viviente, Félix Lorenzo / Toledano Luque, María / San Andrés, E. / Mártil de la Plaza, Ignacio / González Díaz, G. / Bohne, Wolfgang / Röhrich, J. / Strub, Erik
Language: Inglés
Repository: 72
Subject: Oxígeno / Óxido interfacial de silicio / Electrónica

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