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72
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Barradas, N.P.
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González Díaz, G.
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Jeynes, C.
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Martínez Viviente, Félix Lorenzo
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Mártil de la Plaza, Ignacio
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Prado, A. del
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Reehal, H.S.
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Ruiz Merino, Ramón Jesús
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San Andrés, E.
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Wang, L.
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Electrónica
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Silicona
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Subject:
2203 Electrónica
Subject:
Hidrógeno
Year:
2004
Document Type:
Artículo
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Title:
Bonding structure and hydrogen content in silicon nitride thin films deposited by the electron cyclotron resonance plasma method
Author:
Martínez Viviente, Félix Lorenzo
/
Ruiz Merino, Ramón Jesús
/
Prado, A. del
/
San Andrés, E.
/
Mártil de la Plaza, Ignacio
/
González Díaz, G.
/
Jeynes, C.
/
Barradas, N.P.
/
Wang, L.
/
Reehal, H.S.
Language:
Inglés
Repository:
72
Subject:
Hidrógeno
/
Silicona
/
Electrónica
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