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Repository: 72 Subject: 2203 Electrónica Document Type: Artículo Year: 2003

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Title: Characterization of nitrogen-rich silicon nitride films grown by the electron cyclotron resonance plasma technique
Author: Wang, L. / Reehal, H.S. / Martínez Viviente, Félix Lorenzo / San Andrés, E. / Prado, A. del
Language: Inglés
Repository: 72
Subject: Semiconductores / Nitruro de silicio / Electrónica

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