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Cheng X.
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Eliecer Sr. D.
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Yoon Y.-K.
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Batch fabrication
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Benzocyclobutene
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Butenes
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CMOS integrated circuits
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Document Type:
Conferencia
Repository:
61
Subject:
Butenes
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Title:
Highly compact surface micromachined metamaterial circuits using multilayers of low-loss Benzocyclobutene for microwave and millimeter wave applications
Author:
Eliecer Sr. D.
/
Cheng X.
/
Yoon Y.-K.
Language:
Inglés
Repository:
61
Subject:
Batch fabrication
/
Benzocyclobutene
/
Dielectric interlayers
/
Dual Band
/
Electromagnetic structure
/
Fabrication process
/
Finite-ground coplanar waveguides
/
Left handed
/
Low resistivity
/
Low temperatures
/
Meander inductors
/
Metal insulator metal capacitor (MIM)
/
Micromachined
/
Millimeter-wave applications
/
Multi-band operations
/
Multilayer fabrication
/
Multilayer surfaces
/
Multiple devices
/
Negative tones
/
On-wafer
/
Pass bands
/
Post-CMOS
/
RF-circuits
/
Silicon substrates
/
Simulations and measurements
/
Unit cells
/
Butenes
/
CMOS integrated circuits
/
Computer simulation
/
Coplanar waveguides
/
Electric lines
/
Fabrication
/
Metamaterials
/
Millimeter waves
/
Multilayers
/
Three dimensional computer graphics
/
Transmission line theory
/
MIM devices
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