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Astigmatic
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Title:
Transparent glass slab thickness measurement by binary-spot focus signal
Author:
Aguilar, Andrés
/
Torga, Jorge
Language:
Inglés
Repository:
54
Subject:
UTN
/
FRD
/
Focus-Error-Signal
/
Astigmatic
/
Thickness
/
Beam profilometer
/
Multiple spots
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