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Document Type: Artículo Repository: 54 Subject: Thickness measurement Subject: UTN

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Title: Transparent glass slab thickness measurement by binary-spot focus signal
Author: Aguilar, Andrés / Torga, Jorge
Language: Inglés
Repository: 54
Subject: UTN / FRD / Focus-Error-Signal / Astigmatic / Thickness / Beam profilometer / Multiple spots

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