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Aspect ratio
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Immersion Lithography
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Language:
Inglés
Subject:
Carbon reserves
Document Type:
Conferencia
Repository:
61
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Title:
Fabrication of carbon nanofibrous microelectrode array (CNF-MEA) using nanofiber immersion photolithography
Author:
Jao P.F.
/
Franca E.
/
Fang S.-P.
/
Yoon J.
/
Cho K.
/
David Sr. E.
/
Kim G.
/
Wheeler B.
/
Yoon Y.-K.
Language:
Inglés
Repository:
61
Subject:
Aspect ratio
/
Carbon
/
MEMS
/
Microelectrodes
/
Photolithography
/
Diffraction effects
/
Electrical signal
/
Electrospun nanofibers
/
Fabrication process
/
Immersion Lithography
/
Immersion photolithography
/
Micro architectures
/
Microelectrode array
/
Nanofibers
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