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Subject:
Electrónica de potencia
Language:
Inglés
Document Type:
Artículo
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(0.012 seconds)
Title:
Compositional analysis of polycrystalline hafnium oxide thin films by heavy-ion elastic recoil detection analysis
Author:
Martínez Viviente, Félix Lorenzo
/
Toledano Luque, María
/
San Andrés, E.
/
Mártil de la Plaza, Ignacio
/
González Díaz, G.
/
Bohne, Wolfgang
/
Röhrich, J.
/
Strub, Erik
Language:
Inglés
Repository:
72
Subject:
Oxígeno
/
Óxido interfacial de silicio
/
Electrónica
Acceder
Title:
Bonding structure and hydrogen content in silicon nitride thin films deposited by the electron cyclotron resonance plasma method
Author:
Martínez Viviente, Félix Lorenzo
/
Ruiz Merino, Ramón Jesús
/
Prado, A. del
/
San Andrés, E.
/
Mártil de la Plaza, Ignacio
/
González Díaz, G.
/
Jeynes, C.
/
Barradas, N.P.
/
Wang, L.
/
Reehal, H.S.
Language:
Inglés
Repository:
72
Subject:
Hidrógeno
/
Silicona
/
Electrónica
Acceder
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