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Document Type: Artículo Repository: 72 Subject: Tecnología Electrónica Language: Inglés

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Title: Bonding structure and hydrogen content in silicon nitride thin films deposited by the electron cyclotron resonance plasma method
Author: Martínez Viviente, Félix Lorenzo / Ruiz Merino, Ramón Jesús / Prado, A. del / San Andrés, E. / Mártil de la Plaza, Ignacio / González Díaz, G. / Jeynes, C. / Barradas, N.P. / Wang, L. / Reehal, H.S.
Language: Inglés
Repository: 72
Subject: Hidrógeno / Silicona / Electrónica

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